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System and method for using first-principles simulation to analyze a process performed by a semiconductor processing tool
System and method for using first-principles simulation to analyze a process performed by a semiconductor processing tool
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机译:使用第一原理模拟来分析由半导体处理工具执行的过程的系统和方法
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摘要
A method, system and computer readable medium for analyzing a process performed by a semiconductor processing tool. The method includes inputting data relating to a process performed by the semiconductor processing tool, and inputting a first principles physical model relating to the semiconductor processing tool. First principles simulation is performed using the input data and the physical model to provide a first principles simulation resu and the first principles simulation result is used to determine a fault in the process performed by the semiconductor processing tool.
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