TUNING-FORK TYPE QUARTZ-CRYSTAL VIBRATING PIECES AND QUARTZ-CRYSTAL DEVICES COMPRISING SAME

摘要

Tuning-fork type quartz-crystal vibrating pieces are disclosed that exhibit low CI and low interconnection resistance. An exemplary vibrating piece includes vibrating arms extending in a predetermined direction from a base, respective excitation electrodes, a base connected to the vibrating arms, respective supporting arms disposed outboard of respective vibrating arms and extending from the base in the predetermined direction, and respective extraction electrodes connected to respective excitation electrodes. Each excitation electrode comprises two metal layers, including a first metal layer comprising at least one metal selected from Cr, Ni, Ti, Al and W, and a second metal layer overlying the first metal layer and comprising Au or Ag. Each extraction electrode comprises four metal layers, namely the first and second metal layers, a third metal layer overlying the second metal layer and comprising at least one metal selected from Cr, Ni, Ti, Al and W, and a fourth metal layer overlying the third metal layer and comprising Au or Ag.