首页> 外国专利> Narrow graphene nanoribbons from carbon nanotubes

Narrow graphene nanoribbons from carbon nanotubes

机译:碳纳米管的窄石墨烯纳米带

摘要

Disclosed is a method for making graphene nanoribbons (GNRs) by controlled unzipping of structures such as carbon nanotubes (CNTs) by etching (e.g., argon plasma etching) of nanotubes partly embedded in a polymer film. The GNRs have smooth edges and a narrow width distribution (2-20 nm). Raman spectroscopy and electrical transport measurements reveal the high quality of the GNRs. Such a method of unzipping CNTs with well-defined structures in an array will allow the production of GNRs with controlled widths, edge structures, placement and alignment in a scalable fashion for device integration. GNRs may be formed from nanostructures in a controlled array to form arrays of parallel or overlapping structures. Also disclosed is a method in which the CNTs are in a predetermined pattern that is carried over and transferred to a substrate for forming into a semiconductor device.
机译:本发明公开了通过部分地嵌入聚合物膜中的纳米管的蚀刻(例如,氩等离子体蚀刻)来控制诸如碳纳米管(CNT)之类的结构的开拉链来制造石墨烯纳米带(GNR)的方法。 GNR具有平滑的边缘和窄的宽度分布(2-20 nm)。拉曼光谱和电传输测量显示了GNR的高质量。这种将具有良好定义的结构的CNT解压缩为阵列的方法将允许以可扩展的方式生产具有受控宽度,边缘结构,放置和对齐方式的GNR,以用于设备集成。 GNR可以由纳米结构以受控阵列的形式形成,以形成平行或重叠结构的阵列。还公开了一种方法,其中CNT以预定的图案被携带并转移到基板上以形成半导体器件。

著录项

  • 公开/公告号US8236626B2

    专利类型

  • 公开/公告日2012-08-07

    原文格式PDF

  • 申请/专利权人 HONGIE DAI;LIYING JIAO;

    申请/专利号US20100760998

  • 发明设计人 HONGIE DAI;LIYING JIAO;

    申请日2010-04-15

  • 分类号H01L21/335;

  • 国家 US

  • 入库时间 2022-08-21 17:27:43

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号