Micro-electromechanical nozzle arrangement with motion conversion coupling structures

摘要

The invention provides for a micro-electromechanical nozzle arrangement on a substrate with motion conversion coupling structures. The structures operatively link a thermal actuator and a roof structure of the nozzle arrangement. The roof structure defines an ejection port therein. The coupling structure includes a connecting member connected to the thermal actuator, and a tongue and rod assembly located on the substrate, said assembly configured to convert an arcuate displacement of the connecting member into a linear displacement of the roof structure towards the substrate.