SEED RETAINING MEMBER AND METHOD OF MANUFACTURING POLYCRYSTALLINE SILICON USING THE SEED RETAINING MEMBER

摘要

SEED RETAINING MEMBER AND METHOD OF MANUFACTURING POLYCRYSTALLINE SILICON USING THE SEED RETAINING MEMBERABSTRACTA seed retaining member has a recessed portion for breaking and separatingformed at an arbitrary location and thereby allows stress concentration to occur at the recessed portion when applying a breaking load, to enable the seed retaining member to break with a smaller load than conventional. A seed retaining member and method of manufacturing polycrystalline silicon using the seed retaining member are provided, thatcan prevent a crack from propagating in an unintended location in the seed retaining member by allowing the crack to propagate along the recessed portion, and can reduce a workload in a separation work of the seed retaining member and polycrystalline silicon.A seed retaining member (6) for retaining a lower end portion of a seed (4) serving as a seed rod is made of graphite and disposed at a bottom portion of a furnace forproducing polycrystalline silicon by a Siemens method. A groove (16) for breaking and separating is formed in an outer peripheral surface of the seed retaining member (6). The seed retaining member (6) has a columnar base portion (6a) having a first fitting hole (10) for inserting an electrode portion (5), a cylindrical body portion (6b) having a smaller diameter than the base portion (6a), and a conical frustum-shaped tip portion (6c)joined to the body portion (6b) and having a second fitting hole (13) for inserting a lower end portion of the seed (4).Figure 3