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METHOD FOR PRODUCING A PHOTONIC CRYSTAL AND THREE-DIMENSIONAL PHOTONIC CRYSTAL

机译:光子晶体和三维光子晶体的制备方法

摘要

The invention relates to a method for producing a photonic crystal, in which pores (10, 10') are produced in a substrate (11), which pores (10, 10') are filled with at least one material that differs from the substrate material, and subsequently the substrate material is at least partially removed. The invention also relates to a three-dimensional photonic crystal having a periodically arranged column-shaped structure (31'), which consists at least partially of metal or a metal alloy, wherein the columns (32') have a diameter that changes, in particular periodically, in the longitudinal direction. As a result, cost-effective three-dimensional photonic crystals are producible, which can be used for example for IR gas spectrometers or air gas analyzers.
机译:本发明涉及一种制造光子晶体的方法,其中在衬底(11)中产生孔(10、10'),该孔(10、10')填充有至少一种不同于该衬底的材料。然后,至少部分地去除衬底材料。本发明还涉及一种具有周期性排列的柱状结构(31')的三维光子晶体,该柱状结构至少部分地由金属或金属合金组成,其中,柱(32')的直径变化为特别是周期性地在纵向上。因此,可以生产出具有成本效益的三维光子晶体,例如可用于IR气体光谱仪或空气气体分析仪。

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