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CONFOCAL, WIDE BAND SPECTRAL REFLECTION MICROSCOPE, AND RELEVANT SPECTRAL IMAGING METHOD

机译:共焦,宽频带光谱反射显微镜及相关光谱成像方法

摘要

This invention concerns a wideband spectral reflectance confocal microscope comprising a laser source (LS), a beam expander (BE) inserted immediately after the laser source (LS), a beam splitter (BS) in an adequately transparent material through the whole spectral interval emitted by the laser source (LS), a system (OB1) to focus the laser beam on the sample (S) presenting a working distance greater than 5mm and a numerical aperture greater than 0.25, a collection system (M, OB2, PH) and an analysis system (AS) of the laser beam reflected by the sample and transmitted by the beam splitter (BS), said analysis system (AS) comprising a chromatic dispersion subsystem capable of forming the spectrum to be analysed, the microscope being characterized in that: said laser source (LS) is a source that emits simultaneously at several wavelengths in the visible and infrared regions; said focusing system (OB1 ) is free of chromatic aberration; said beam splitter (BS) is positioned at 45° in respect of the laser beam direction; said collection system (M, OB2, PH) is free of chromatic aberration; so that at each analysed point of the sample (S) corresponds unambiguously a frequency response spectrum collected by the collection system (M, OB2, PH). The invention concerns as well a spectral imaging method of a sample (S) by means of a wideband spectral reflectance confocal microscope, besides the utilisation of the microscope of this invention for the same imaging.
机译:宽带光谱反射共聚焦显微镜技术领域本发明涉及一种宽带光谱反射共聚焦显微镜,该显微镜包括激光源(LS),紧接在激光源(LS)之后插入的扩束器(BE),在整个发射光谱间隔内处于足够透明的材料中的分束器(BS)。通过激光源(LS),系统(OB1)将激光束聚焦在样品(S)上,该样品具有大于5mm的工作距离和大于0.25的数值孔径,一个采集系统(M,OB2,PH)由样品反射并由分束器(BS)透射的激光束的分析系统(AS),所述分析系统(AS)包括能够形成要分析的光谱的色散子系统,显微镜的特征在于:所述激光源(LS)是在可见光和红外区域中同时发射几种波长的光源;所述聚焦系统(OB1)没有色差;所述分束器(BS)相对于激光束方向成45°角。所述采集系统(M,OB2,PH)没有色差;从而在样品(S)的每个分析点上都明确地对应了由采集系统(M,OB2,PH)采集的频率响应频谱。除了将本发明的显微镜用于相同的成像之外,本发明还涉及借助于宽带光谱反射共聚焦显微镜对样品(S)的光谱成像方法。

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