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SYSTEMS, METHODS AND APPARATUS THAT EMPLOY STATISTICAL ANALYSIS OF STRUCTURAL TEST INFORMATION TO IDENTIFY YIELD LOSS MECHANISMS

机译:进行结构测试信息的统计分析以确定产量损失机理的系统,方法和装置

摘要

A method for statistically analyzing structural test information to identify at least one yield loss mechanism includes executing a plurality of instructions on a computer system. The executed instructions cause the computer system to perform the steps of: 1) identifying potential root causes for items of structural test information obtained for a plurality of semiconductor devices; 2) statistically analyzing the items of structural test information to identify at least one non-random device failure signature within the items of structural test information; and 3) identifying from the potential root causes a probable root cause for at least a first of the at least one non-random device failure signature.
机译:一种用于统计分析结构测试信息以识别至少一个成品率损失机制的方法,包括在计算机系统上执行多个指令。所执行的指令使计算机系统执行以下步骤:1)识别为多个半导体器件获得的结构测试信息项的潜在根本原因; 2)对结构测试信息项进行统计分析,以识别结构测试信息项中的至少一个非随机设备故障签名; 3)从潜在的根本原因中识别出至少一个非随机设备故障签名中的至少第一者的可能的根本原因。

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