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SYSTEMS, METHODS AND APPARATUS THAT EMPLOY STATISTICAL ANALYSIS OF STRUCTURAL TEST INFORMATION TO IDENTIFY YIELD LOSS MECHANISMS
SYSTEMS, METHODS AND APPARATUS THAT EMPLOY STATISTICAL ANALYSIS OF STRUCTURAL TEST INFORMATION TO IDENTIFY YIELD LOSS MECHANISMS
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机译:进行结构测试信息的统计分析以确定产量损失机理的系统,方法和装置
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摘要
A method for statistically analyzing structural test information to identify at least one yield loss mechanism includes executing a plurality of instructions on a computer system. The executed instructions cause the computer system to perform the steps of: 1) identifying potential root causes for items of structural test information obtained for a plurality of semiconductor devices; 2) statistically analyzing the items of structural test information to identify at least one non-random device failure signature within the items of structural test information; and 3) identifying from the potential root causes a probable root cause for at least a first of the at least one non-random device failure signature.
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