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Correction of imaging errors in alignment systems with several measurement planes located in succession in the beam path
Correction of imaging errors in alignment systems with several measurement planes located in succession in the beam path
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机译:校正对准系统的成像误差,该对准系统具有连续位于光束路径中的几个测量平面
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摘要
A method for correction of the measured values of optical alignment systems with at least two measurement planes which are located in succession in the beam path. From each measurement plane, the beam path to the light source is transformed back in order to compute new incidence points using a beam which has been corrected by taking into consideration imaging errors.
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