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Modifying the Electro-Static Behavior of Devices
Modifying the Electro-Static Behavior of Devices
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机译:修改设备的静电行为
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摘要
A MEMS device is packaged with a control material that is included in the package to affect a rate of electro-static discharge when at least a portion of a movable element comes into contact with a device layer. The control material may be inserted into the package as part of any of several structural components of the package or the MEMS device.
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