MOVING-REFLECTOR LASER ALIGNMENT DEVICE, MOVING-REFLECTOR TARGET SENSOR, AND LASER ALIGNMENT METHOD THEREOF

摘要

A moving-reflector laser alignment device, a moving-reflector target sensor, and a laser alignment method thereof are disclosed. The moving-reflector laser alignment device includes: an image collecting device (131) forming an image by collecting the incident light; a moving-reflector (113，123) reflecting the laser onto the image collecting device to form light spot; and a lens (132) transmitting the target onto the image collecting device; the moving-reflector (113，123) can move linearly relative to the image collecting device. By the moving-reflector system, the invention implements high precision translation of the moving-reflector in small scale, quick and precise alignment of the laser to the target; the invention also solves light spot intermixing problem, saves alignment time, and improves the alignment precision.