PRESSURE SENSOR AND STRESS MEASURING STRUCTURE FOR THE PRESSURE SENSOR CAPABLE OF RECOGNIZING STRESS DEPENDING ON CHANGE IN THE LENGTH OF A GROOVE

摘要

PURPOSE: A pressure sensor and a stress measuring structure for the pressure sensor are intended to provide an optimal pressure-resistance characteristic by forming a groove on the corner of the diaphragm of a pressure sensor for low pressure and recognizing stress depending on change in the length of the groove.;CONSTITUTION: A pressure sensor comprises a diaphragm(130) and a bridge(150). The diaphragm is formed on a substrate(110). The bridge connects the diaphragm to the substrate. A corner groove is formed on at least a part of the corners of the bridge. The number of the bridge is one or more. The corner groove is formed corresponding to all corners of the bridge. The length of the corner groove is 7μm~8μm. The substrate comprises an n-type of a high-resistance silicon substrate.;COPYRIGHT KIPO 2012