CERAMIC HEATER FOR HIGH TEMPERATURE AND A MANUFACTURING METHOD OF THE SAME, WHICH CAN BE STABLY OPERATED IN HIGH TEMPERATURE BY COATING A SUBSTRATE FOR A HEATER WITH NICKEL COMPOUND WITH HIGH HEAT RESISTANCE

摘要

PURPOSE: A ceramic heater for high temperature and a manufacturing method of the same are provided to prevent the peeling-off phenomenon of a plating layer in spite of high temperature.;CONSTITUTION: A ceramic heater for high temperature comprises the next step. The nickel is deposited on the substrate surface. The nickel deposited substrate surface is scrubbed. The scrubbed substrate surface is plasma-processed. The surface of a substrate is firstly etched. The firstly etched surface of the substrate is secondly etched after oil removal. Catalyst is added to the secondly etched substrate. The nickel pattern is formed on a non-electrolysis plated substrate.;COPYRIGHT KIPO 2012