METHOD FOR ARRAY SUBSTRATE FOR A LIQUID CRYSTAL DISPLAY DEVICE CAPABLE OF PREVENTING THE DANGER BY THE OVERHEAT BY AN CHAIN DECOMPOSITION REACTION OF A HYDROGEN PEROXIDE

摘要

PURPOSE: A method for array substrate for a liquid crystal display device is provided to minimize the amount of hydrogen peroxide in an etchant composition and control the concentration of the copper ion with in the etchant.;CONSTITUTION: A gate electrode is formed in the top of a substrate. A gate insulating layer is formed in the top of the substrate. A semiconductor layer is formed on a gate isolation layer. A source/drain electrode is formed on a semiconductor layer. A pixel electrode is connected to the drain electrode. A etching solution composition includes ammonium oxalate 6~10 weight%, hydrogen peroxide 0.1~10 weight%, and the water of the remaining amount about the total weight of composition.;COPYRIGHT KIPO 2012