DEVICE AND METHOD OF INSPECTING DEFECTS OF A PLANAR TRANSPARENT UNIT CAPABLE OF DETECTING FINE FLAWS WITHOUT MAKING PRECISE INVESTIGATION USING A MICROSCOPE

摘要

PURPOSE: Device and method of inspecting defects of a planar transparent unit are provided to enable data by depth to be timely recognized since the depth of a fine flaw can be calculated based on the intensity of a received signal.;CONSTITUTION: A device(10) for inspecting defects of a planar transparent unit comprises a first projector(18), a second projector(20), a first light receiver(22), and a second light receiver(24). The first projector radiates light to a first side of the planar transparent unit. The second projector radiates light to a second side facing the first side of the planar transparent unit. The first light receiver receives front scattering light generated by the light from the first projector. The second light receiver receives front scattering light generated by the light from the second projector. The angle Θ1 between the light receiving direction of the first light receiver and the normal direction of a second surface facing a first surface of the planar transparent unit is greater than 0° and 60° or less.;COPYRIGHT KIPO 2012