LASER ULTRASONIC MEASURINGUSING ULTRA FAST LASER WITH HIGH REPETITION RATE

摘要

The present invention relates to an apparatus for measuring the defect and the thickness of the object using the laser-induced ultrasound, the irradiation by the pulsed laser beam to induce the ultrasonic ultrasound guidance module for measuring an object, the measurement laser beam for detecting the ultrasound signal derived ultrasonic signal information by irradiating a target object detection module for the measurement, and the measurement of the target object from the ultrasonic signal information having an ultrasonic signal processing module for measuring the information of the characteristics, the pulsed laser beam is an ultrashort pulse laser beam gobanbok, the ultrasound guidance module, and the pulse excitation laser device for generating the ultrasound pulse laser beam, the pulse The short wavelength of the laser beam is a beam having a wavelength for generating a pulse width control device to go ahead of the long beam path difference, and wherein the pulse width control device and a pair of prisms for generating the path difference, the direction of movement of the beam by comprising a mirror for switching, pulse the laser beam incident on the pulse width adjustment device is, after passing through the first prism and the second prism, by a station passes through the second prism and the first prism, the path difference is generated which is characterized in that, according to the ; The present invention uses the ultrashort pulse laser beam gobanbok, thin films or electrode can measure the fine defect, and laser pulse energy is compared with the conventional ultrasonic thousands to tens of minutes of the 1, it does not scratch the recorded measurement target object.