LASER IRRADIATION APPARATUS CAPABLE OF SIMPLIFYING PROCESSES AFTER A CRYSTALLIZATION PROCESS

摘要

PURPOSE: A laser irradiation apparatus is provided to multiply treatment quantity per hour by crystallizing a plurality of display spaces with one laser generator.;CONSTITUTION: A laser generator(910) generates laser light which is used for crystallization. A semiconductor layer(SC) comprises a plurality of pixel regions(PX). A first optical system(931) receives the laser light and irradiates first laser slit light(941) according to a first irradiating direction. A second optical system(932) receives the laser light and irradiates second laser slit light(942) according to a second irradiating direction. A optical switching part(920) time-shares the laser light which is generated in the laser generator and transfers the laser light to the first optical system and the second optical system.;COPYRIGHT KIPO 2012