COOLING WATER PASSAGE ASSEMBLY ENABLE TO BE USED INSIDE A VACUUM CHAMBER AND COOLING WATER PASSAGE UNIT

摘要

PURPOSE: A cooling water passage assembly and a cooling water passage unit are provided to smoothly circulate cooling water and to be used inside a vacuum chamber.;CONSTITUTION: A cooling water passage assembly comprises first cooling water passage assembly unit(101), and second cooling water passage assembly unit. The first cooling water passage assembly unit comprises a first through-hole, and a first coupling part. The second cooling water passage assembly unit comprises a second through-hole, and a second coupling part. The first coupling part and through-hole are respectively formed along to a longitudinal direction of the first cooling water passage assembly unit. The second coupling part and through-hole are respectively formed along to a longitudinal direction of the second cooling water passage assembly unit. The first and second cooling water passage assembly units are joined by interlocking the first coupling part and the second coupling part.;COPYRIGHT KIPO 2012