METHOD FOR SETTING THE POSITION OF A PICKER HEAD FOR A SEMICONDUCTOR MANUFACTURING DEVICE, CAPABLE OF SETTING THE PICK-UP POSITION OF A SEMICONDUCTOR CHIP AND THE POSITION OF A PLATE ACCURATELY

摘要

PURPOSE: A method for setting the position of a picker head for a semiconductor manufacturing device is provided to mount a substrate in a chuck table accurately by picking up a semiconductor chip to be transferred in a wafer.;CONSTITUTION: A base(10) is horizontally movable. A wafer table(20) is installed in a base. An ejector(30) is formed in the wafer table to be movable up and down. A first lighting unit(40) is installed in one side of the wafer table. A chuck table(50) is installed on the support(55) of the main body.;COPYRIGHT KIPO 2012