THIN FILM TRANSISTOR BASE BIOSENSOR AND A MANUFACTURING METHOD, CAPABLE OF IMPROVING A DETECTION SENSITIVITY OF A SENSOR BY INTENSIVELY FIXING THE BIO MOLECULAR ON A GATE REGION

摘要

PURPOSE: A thin film transistor base biosensor and a manufacturing method thereof are provided to simplify a manufacturing process by using the interfacial property of a hydrophilic gate isolation layer and hydrophobicity photoresist.;CONSTITUTION: A manufacturing method of a thin film transistor base biosensor is as follows. A source electrode(11) and drain electrode(12) are formed on the substrate(10). A part of the substrate in which the source electrode and drain electrode are not formed is etched so that a recessed channel(15) is formed. A hydrophilic property gate isolation layer(13) is formed on the substrate in which the source electrode, the drain electrode, and the recessed channel are formed. A hydrophobicity photoresist(14) is spread in the hydrophilic property gate isolation layer. The hydrophobicity photoresist is developed after exposing to outside and a gate region is formed.;COPYRIGHT KIPO 2012