METHOD FOR FORMING A FINE PATTERN, A MINUTE CHANNEL TRANSISTOR USING THE SAME, AND A METHOD FOR FORMING A MINUTE CHANNEL EMISSION TRANSISTOR

摘要

PURPOSE: A method for forming a fine pattern, a minute channel transistor using the same, and a method for forming a minute channel emission transistor are provided to manufacture a minute channel transistor device with high performance by using an organic wire or organic/inorganic hybrid wire as a patterning mask.;CONSTITUTION: A solution storage unit(10) stores organic solutions. A discharging control unit(20) discharges the organic solutions through a nozzle(30) with a fixed speed. A voltage applying unit(40) applies a high voltage to the nozzle. A robot stage(60) moves a collector(50). A micro distance controller(70) controls a distance between the nozzle and the collector.;COPYRIGHT KIPO 2012