MULTI-WAFER FINGER ROBOT WITH A VARIABLE PITCH CAPABLE OF CONTROLLING THE PITCH BETWEEN FINGERS ACCORDING TO EACH PROCESS

摘要

PURPOSE: A multi-wafer finger robot with a variable pitch is provided to control a pitch between fingers by connecting, separating a ball screw and a ball screw nut by a coupler.;CONSTITUTION: A multi-wafer finger robot with a variable pitch comprises a power generator(300), a first driving unit(400), a second driving unit(500) and a finger unit(600). The first and second driving units convert rotary motions into vertical motions of different pitches by a guide connected to a nut and a ball screw with receiving the power form the power generator. The finger unit is connected to the first and second driving unit. The finger unit has a different space for wafers by the vertical motions of the different pitch converted by the first and second diving unit.;COPYRIGHT KIPO 2012