FRONT OPENING UNIFIED POD TRANSFER APPARATUS OF A PURGE SYSTEM CAPABLE OF PREVENTING DAMAGE OF A WAFER WHILE TRANSFERRING A FRONT OPENING UNIFIED POD

摘要

PURPOSE: A front opening unified pod(FOUP) transfer apparatus of a purge system is provided to automatically supply a FOUP transferred along a wafer transfer line to the purge system, thereby improving equipment operation efficiency.;CONSTITUTION: A horizontal driving part(110) is arranged in a direction which crosses a stage of a purging system and a transfer line of a FOUP(Front Opening Unified Pod). A first moving body is horizontally transferred using the horizontal driving part. A vertical driving part(130) is arranged on the first moving body in a horizontal direction. A second moving body(140) is vertically transferred using the vertical driving part. A gripper(150) selectively grips the FOUP by being installed on the second moving body.;COPYRIGHT KIPO 2012