PIEZOELECTRIC MICRO ENERGY HARVESTER SENSITIVE TO AN EXTERNAL BROADBAND FREQUENCY AND A MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A piezoelectric micro energy harvester and a manufacturing method thereof are provided to generate power by converting mechanical energy into electric energy.;CONSTITUTION: A plurality of cavities(116) are formed in one region of a substrate(101) with preset depth and width. A plurality of support units support structures formed on the substrate. A plurality of electrode pads(Ec,Es) transmit a signal to the outside. A plurality of electrode units(114) collect electric energy generated by a piezoelectric layer(130) and includes a central electrode unit(114a) and a lateral electrode unit(114b).;COPYRIGHT KIPO 2012