HIGH SPEED, HIGH RESOLUTION, THREE DIMENSIONAL SOLAR CELL INSPECTION SYSTEM

摘要

An optical inspection system and method are provided. A workpiece transport moves a workpiece (12) in a nonstop manner. An illuminator (40) includes a light pipe and is configured to provide a first and second strobed illumination field types. First (3) and second (5) arrays of cameras (2) are arranged to provide stereoscopic imaging of the workpiece (12). The first array (3) of cameras is configured to generate a first plurality of images of the workpiece (12) with the first illumination field and a second plurality of images of the workpiece (12) with the second illumination field. The second array (5) of cameras is configured to generate a third plurality of images of the workpiece (12) with the first illumination field and a fourth plurality of images of the workpiece (12) with the second illumination field. A processing device stores at least some of the first, second, third, and fourth pluralities of images and provides the images to an other device.