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COATING MATERIAL FOR THERMAL SPRAY AND A MANUFACTURING AND COATING METHOD THEREOF, CAPABLE OF APPLYING A ZR-DOPED Y2O3 COATING LAYER IN A PLASMA CONDITION USING F AND CL
COATING MATERIAL FOR THERMAL SPRAY AND A MANUFACTURING AND COATING METHOD THEREOF, CAPABLE OF APPLYING A ZR-DOPED Y2O3 COATING LAYER IN A PLASMA CONDITION USING F AND CL
PURPOSE: A coating material for thermal spray and a manufacturing and coating method thereof are provided to improve the durability and lifespan of components and to guarantee a chamber in a high purity condition by applying Zr-doped Y2O3 coating layer.;CONSTITUTION: A coating method of coating materials for thermal spray is as follows. Mixed powder in which Y2O3 powder and ZrO2 powder are mixed, binder, and dispersing agent are put in liquid solvent. Uniformly mixed slurry is manufacture by ball-milling. The mixed solution of the slurry is sprayed as micron sized droplets and the solvent is removed under a high temperature air or an inner gas condition. Granule powders are manufactured and is thermally treated at 1,000-1,600°C.;COPYRIGHT KIPO 2012
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机译:目的:提供用于热喷涂的涂料及其制造和涂覆方法,以通过涂覆掺Zr的Y2O3涂层来提高组件的耐用性和使用寿命,并确保腔室处于高纯度条件。热喷涂用涂料的种类如下。将Y 2 O 3粉末和ZrO 2粉末混合的混合粉末,粘合剂和分散剂置于液体溶剂中。通过球磨生产均匀混合的浆料。将浆料的混合溶液以微米级液滴的形式喷雾,并在高温空气或内部气体条件下除去溶剂。制造颗粒状粉末并在1,000-1,600°C下进行热处理; COPYRIGHT KIPO 2012
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