DLC THIN FILM CONTAINING SILICON, A MANUFACTURING METHOD THEREOF, AND A USAGE THEREOF, CAPABLE OF SEMI-PERMANENTLY LASTING THE HYDROPHILICITY OF A SURFACE OF A THIN FILM WITHOUT AN AGING PHENOMENON

摘要

PURPOSE: A DLC(Diamond-Like Carbon) thin film containing silicon, a manufacturing method thereof, and a usage thereof are provided to improve an anti-corrosion property of a DLC thin film and blood compatibility by modifying a surface of the thin film and controlling surface energy.;CONSTITUTION: A DLC thin film comprises silicon in the inside and a surface of a thin film. An atom(A) giving hydrophilicity to the surface of the thin film is chemically bonded with carbon and silicon atom existing on the surface of the thin film. A content of the silicon is 0.5 to 17at.% or 1.0 to 2.5at.%. A surface roughness is 10 to 20nm.;COPYRIGHT KIPO 2012