SILICON NANO WIRE BIO SENSOR MODULE, CAPABLE OF REDUCING A SIZE THROUGH A FLUID CHANNEL BEING INTEGRATED WITH A SILICON NANO WIRE

摘要

PURPOSE: A silicon nano wire bio sensor module is provided to reduce a size and energy consumption and to use a current flowing in both end part of a silicon nano wire as signals.;CONSTITUTION: A silicon nano wire bio sensor module comprises a first silicon substrate(110), a second silicon substrate(130), a light guide unit(140), and a light source unit(150). Silicon nano wires(120) are formed on the first silicon substrate. The second silicon substrate is bonded to the first silicon substrate. A micro fluid channel is formed on the second silicon substrate so that the silicon nano wires are exposed to outside. The light guide unit is arranged to be inserted into the second silicon substrate and a part of the light guide unit is projected to the outside of the second silicon substrate. The light source unit is arranged to be spaced from an end part of the light guide unit at a predetermined interval.;COPYRIGHT KIPO 2013