ORGANOPOLYSILOXANE SOLUBLE TO NON-POLAR ORGANIC SOLVENT WHILE HAVING EXCELLENT ADHESION AND HEAT RESISTANCE, A PRE-ADHESIVE COMPOSITION USING THE SAME, AND A MANUFACTURING METHOD OF A THIN-FILM WAFER USING THE COMPOSITION

摘要

PURPOSE: Organopolysiloxane and a pre-adhesive composition are soluble into a non-polar organic solvent, and to be separated in short time, and to be hardly soluble into a polar solvent, and to be not separated when spreading or removing photoresist on a semiconductor of a conjugation substrate.;CONSTITUTION: A non-aromatic saturated hydrocarbon group-containing organopolysiloxane comprises: 40-99 mol% of a siloxane unit(T unit) represented by R^1SiO_3/2; 59 mol% or less of a siloxane unit(D unit) represented by R^2R^3SiO_2/2; and 1-30 mol% of a siloxane unit(M unit) represented by R^4R^5R^6SiO_1/2. In the chemical formula, R^1-R^6 is a monovalent organic group or hydrogen. A pre-adhesive composition comprises the organopolysiloxane and an organic solvent.;COPYRIGHT KIPO 2013