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IMAGE SENSOR AND A MANUFACTURING METHOD THEREOF FOR IMPROVING A LIGHT FOCUSING ABILITY

机译:用于提高光聚焦能力的图像传感器及其制造方法

摘要

PURPOSE: An image sensor and a manufacturing method thereof are provided to improve a lens design margin by forming a focusing pattern between a lens and an optical waveguide.;CONSTITUTION: A light receiving element(33) is formed on a substrate(31) of each unit pixel region. An interlayer insulating film(34) is formed on the substrate. An optical waveguide(37) is formed on the interlayer insulating film corresponding to the light receiving element. A focusing pattern is formed on the interlayer insulating film corresponding to the unit pixel region. A planarization film is formed on the entire area of the substrate and covers the focusing pattern.;COPYRIGHT KIPO 2013;[Reference numerals] (AA,BB,CC) Unit pixel region
机译:目的:提供一种图像传感器及其制造方法,以通过在透镜和光波导之间形成聚焦图案来提高透镜设计裕度。组成:光接收元件(33)形成在光传感器的基板(31)上每个单位像素区域。在基板上形成层间绝缘膜(34)。在对应于光接收元件的层间绝缘膜上形成光波导(37)。在与单位像素区域相对应的层间绝缘膜上形成聚焦图案。平坦化膜形成在基板的整个区域上并覆盖聚焦图案。; COPYRIGHT KIPO 2013; [参考数字](AA,BB,CC)单位像素区域

著录项

  • 公开/公告号KR20120121728A

    专利类型

  • 公开/公告日2012-11-06

    原文格式PDF

  • 申请/专利权人 SK HYNIX INC.;

    申请/专利号KR20110039697

  • 发明设计人 LIM YOUN SUB;

    申请日2011-04-27

  • 分类号H01L27/146;

  • 国家 KR

  • 入库时间 2022-08-21 17:08:49

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