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IMAGE SENSOR AND A MANUFACTURING METHOD THEREOF FOR IMPROVING A LIGHT FOCUSING ABILITY
IMAGE SENSOR AND A MANUFACTURING METHOD THEREOF FOR IMPROVING A LIGHT FOCUSING ABILITY
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机译:用于提高光聚焦能力的图像传感器及其制造方法
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摘要
PURPOSE: An image sensor and a manufacturing method thereof are provided to improve a lens design margin by forming a focusing pattern between a lens and an optical waveguide.;CONSTITUTION: A light receiving element(33) is formed on a substrate(31) of each unit pixel region. An interlayer insulating film(34) is formed on the substrate. An optical waveguide(37) is formed on the interlayer insulating film corresponding to the light receiving element. A focusing pattern is formed on the interlayer insulating film corresponding to the unit pixel region. A planarization film is formed on the entire area of the substrate and covers the focusing pattern.;COPYRIGHT KIPO 2013;[Reference numerals] (AA,BB,CC) Unit pixel region
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