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THERMAL SPRAYED YTTRIA-CONTAINING COATING FOR PLASMA REACTOR
THERMAL SPRAYED YTTRIA-CONTAINING COATING FOR PLASMA REACTOR
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机译:等离子体反应器热喷涂含钇涂层
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摘要
Part of semiconductor processing equipment is erosion in the plasma atmosphere , corrosion resistance and / or corrosion - erosion and providing a thermal spray coating comprises yttria -containing . This coating can protect the substrate from physical and / or chemical attack .
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