(Meth)acrylate compound having perfluoropinacol moiety and its polymers and polymer composition containing the same

摘要

PURPOSE: A (meth)acrylate compound containing a perfluoropinacol group is provided to form an upper film capable of improving a contact angle with water and a development rate in a developer. CONSTITUTION: A polymer is prepared by polymerizing (meth)acrylate containing a perfluoropinacol group. The polymer is prepared by polymerizing a monomer containing 30~100 mole % of (meth)acrylate containing a perfluoropinacol group of chemical formula 1. In chemical formula 1, R1 is hydrogen, methyl or trifluoromethyl group; R2 is none or C1~20 linear or branched alkylene group, C1~20 linear or branched alkylene group containing a hydroxy group, or C4~12 cyclic alkylene group; and X is none or -O-.