METHOD AND APPARATUS FOR DETERMINING RELEVANCE VALUES FOR A DETECTION OF A FAULT ON A CHIP AND FOR DETERMINING A FAULT PROBABILITY OF A LOCATION ON A CHIP

摘要

This specification is entered in the input node of each of the first number I for defect detection on a chip node i and a second combination of the measurement of the number of measurement nodes of node m M (i, m) relevance (relevance) represents the relevant value (relevance value) of the R (i, m) is a method for determining a been described, the method comprising: In the input nodes of the first number I comprising the steps of: applying a test of the third number K, the third number K k of each test type is selected for each input test node i U (k, i) step of defining and applying a , to obtain the measurement value of the third number K m for each measurement node the measurement nodes of the second number M, at each measurement of the measurement nodes of the second node for each test number M k of the test of the third number K the method comprising: measuring a signal for each measurement value Y (k, m) is the measured test their own k and the measuring step are associated with measuring the measured node m, to determine the relevance value R (i, m) a step, each relevance value of each combination (i, m) of the input node i the third number K of the test is defined for the selected input U (k, i) and the measurement nodes of each of the combination (i, m) m measured value of the third number K is associated with the Y (k, m) and a relevance value determination step is calculated based on the correlation (correlation) between.