Method of complex context-aware for status monitoring of semiconductor equipment and system thereof

摘要

PURPOSE: A complex situation method and system are provided to prevent danger which is expected in advance by monitoring error factors of semiconductor equipment in real time and to increase the power lifespan of a sensor node. CONSTITUTION: Each sensing value is received from a sensor node equipped with a plurality of sensors(S310). Whether the sensing value of the sensors oversteps corresponding critical range or not is monitored(S320). An alarm informing an error about a specific single sensor is created in case the sensing value of the specific single sensor oversteps the corresponding critical range(S330). The sensing value of the other single sensor is monitored for a fixed waiting time(S340). An alarm informing a complex error by the specific single sensor and the other single sensor in case the sensing value of the other single sensor oversteps the corresponding critical range(S350).