Carrier gas retrieval device for atmospheric pressure plasma system

摘要

PURPOSE: A carrier gas recovering apparatus of an atmospheric pressure plasma system, and a method thereof are provided to recycle carrier gas, and to reduce the maintenance cost of the carrier gas. CONSTITUTION: A carrier gas recovering apparatus of an atmospheric pressure plasma system includes a gas supplying unit(30), an exhausting unit(50), a processing unit(60), a separating unit(70), and a booster pump(90). The gas supplying unit supplies source gas containing oxygen, and carrier gas to an atmospheric pressure plasma module(40). The exhausting unit discharges the gas inside the atmospheric pressure plasma module. The processing unit receives mixed gas of the carrier gas and ozone from the exhausting unit, and changes the ozone in to the oxygen.