Method for arrange digital mirror device in maskless exposure device

摘要

Provided are a method for arranging digital mirror devices(DMDs) in maskless exposure device so that the DMDs have straight traveling property together with stage, and the each DMD is accurately arranged in the maskless exposure device. The method comprises the steps of (i) installing a plurality of DMDs(10) in maskless exposure device so as to have straight traveling property together with stage, and (ii) arranging the DMDs(10) within range of allowable error. The method optionally comprises the step for adjusting output patterns of the DMDs(10) so as to coincide with patterns of mask glass installed on the stage. The steps(ii) comprises adjusting a different value between centers of image patterns irradiated by the DMDs(10) and patterns formed on the glass for arrangement of the DMDs(10) to be included in range of allowable error.