Device and Method for Calibrating Discharge Coefficients of Sonic Nozzles using Constant Volume Flow-Meter

摘要

The present invention relates to a sonic nozzle discharge coefficient correction apparatus using a static-type flow meter, it is an object of the present invention is to provide a sonic nozzle calibration device using runoff coefficient that allows measurement of minute flow rate with high accuracy, the static type flow meter has the same sonic nozzle discharge coefficient naemeurosseo get the correct value of the sonic nozzle. In the leakage factor correction device (10) for calculating a correction value of the leakage coefficient sonic nozzle discharge coefficient correction apparatus using a static type flow meter of the present invention, the sonic nozzle 50, depending on the flow direction of the fluid inlet, inlet fluid The front end of the incoming direction, the inlet fluid is discharged to a direction referred to as the rear end, the static type flow meter (11); Flow shut-off valve 14 which is provided on the front end of the static type flow meter (11); The suction shut-off valve which is provided downstream of the static type flow meter (11) (15); Made including, the flow rate of the sonic nozzle shut-off valve 50 is connected to the front end (14), the suction shut-off valve at the rear end of the vacuum pump (15, 55) are connected, the sonic nozzle 50 of the chamber provided in the pressure and the temperature value measured by the shear pressure / temperature measurement unit 121 provided on the first measurement point ( ) and the front end, the static type flowmeter 11 is within the second measurement point ( ) Pressure / temperature measuring unit using the pressure and the temperature value measured by the (122) characterized by calculating the correction value of the leakage coefficient sonic nozzle (50). ;