METHOD FOR MEASURING NUMBER OF FINE PARTICLES IN ULTRAPURE WATER, FILTRATION DEVICE FOR MEASURING NUMBER OF FINE PARTICLES, METHOD FOR MANUFACTURE THEREOF AND HOLLOW FIBER FILM UNIT FOR USE IN THE DEVICE

摘要

can measure particles in the pure water of the present invention , at least the inner surface of the skin layer can capture particles in ultrapure water pressure filtration of ultrapure water with the hollow fiber membrane having a step , the step of exposing the inside surface of the hollow fiber membrane , and is characterized in that it comprises a step of measuring the number of fine particles in the exposed surface .