Patterned substrate for immobilizing biomolecule, manufacturing method of the same, and microarray sensor of biochip

摘要

The invention comprising: a substrate; A hydrophobic film formed on the upper substrate; And the hydrophobic film hydrophilic film on a predetermined region of the upper formed by patterning a relief structure; includes, the hydrophobic membrane helium, neon, argon, krypton, xenon, radon, and one or more inert is selected from the group consisting of hydrogen including gas and shoot tetraethyl in that the gas atmosphere not containing oxygen silica Kerry agent (tetraethyl orthosilicate, TEOS) to a TEOS deposition film formed by treatment with plasma, tetraethyl ortho in a gas atmosphere containing the hydrophilic membrane oxygen Silicate Kerry agent (Tetraethyl orthosilicate, TEOS) to provide a biomolecule immobilized patterned substrates, characterized in that a hydrophilic membrane formed by TEOS deposition treatment with plasma. Patterning for biomolecule immobilization according to the present invention the substrate has its surface plasma-treatment and because the patterned modified with a hydrophobic region and a hydrophilic region by a lithography process biomolecules, in particular, can make various pattern the protein in the micro-level resolution and it may be immobilized by integrating a high density. In addition, the hydrophobic surface modification by plasma treatment and a hydrophilic surface may be the difference between the water contact angle so large that the same band characteristic is a biomolecule group, especially a group of proteins immobilized with high selectivity. ;