Method for Fabricating Micro- or Nano-Sized Patterns Using Liquid Crystal Phase and Defect Structure Thereof

摘要

PURPOSE: A method for forming a micro or nano pattern using a liquid crystal phase or a coupling structure is provided to quickly form a pattern by high mobility of liquid crystals. CONSTITUTION: A surface is processed to adjust orientation of liquid crystal molecules on a substrate. A liquid crystal molecular layer is formed in a substrate. A regular structure is formed on the liquid crystal molecular layer according to a phase structure of the liquid crystal molecules. The regular structure is formed on a photoresist by micro or nano patterns using a photo mask.