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APPLICATION OF A TARGET FOR SPARK SPRAYING AND METHOD OF OBTAINING SUITABLE FOR THIS APPLICATION OF TARGET
APPLICATION OF A TARGET FOR SPARK SPRAYING AND METHOD OF OBTAINING SUITABLE FOR THIS APPLICATION OF TARGET
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机译:火花喷涂靶材的应用和获得该靶材的合适方法
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摘要
1. The use of the target in the process of applying a spark coating to obtain metal oxide and / or metal nitride coatings, whereby a target is used in which a non-conductive oxide and / or nitride of the target metal is embedded in the matrix of this target metal and, therefore, the target can be operated at a temperature which is higher than the melting temperature of the metal used in the target. ! 2. The use of the target according to claim 1, wherein the target contains an aluminum matrix into which non-conductive particles of aluminum oxide and / or particles of aluminum nitride are embedded. ! 3. The use of the target according to claim 2, wherein the alumina particles generally have a diameter that is smaller than a typical spark discharge diameter, and thus less than 100 microns, preferably less than 50 microns. ! 4. The use of the target according to claim 2 or 3, and the content of aluminum oxide in the aluminum matrix is less than 70 vol.%. ! 5. The use of a target according to any one of claims 1 to 3, wherein the target is a target obtained by powder metallurgy. ! 6. The use of the target according to claim 4, wherein the target is a target obtained by powder metallurgy. ! 7. A method for producing a target that is suitable for use according to any one of claims 2 to 6, wherein the target is obtained by a holographic structuring method, wherein the alumina layer is structured in the form of a lattice, and the grooves formed in the lattice are filled with aluminum.
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