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APPLICATION OF A TARGET FOR SPARK SPRAYING AND METHOD OF OBTAINING SUITABLE FOR THIS APPLICATION OF TARGET

机译:火花喷涂靶材的应用和获得该靶材的合适方法

摘要

1. The use of the target in the process of applying a spark coating to obtain metal oxide and / or metal nitride coatings, whereby a target is used in which a non-conductive oxide and / or nitride of the target metal is embedded in the matrix of this target metal and, therefore, the target can be operated at a temperature which is higher than the melting temperature of the metal used in the target. ! 2. The use of the target according to claim 1, wherein the target contains an aluminum matrix into which non-conductive particles of aluminum oxide and / or particles of aluminum nitride are embedded. ! 3. The use of the target according to claim 2, wherein the alumina particles generally have a diameter that is smaller than a typical spark discharge diameter, and thus less than 100 microns, preferably less than 50 microns. ! 4. The use of the target according to claim 2 or 3, and the content of aluminum oxide in the aluminum matrix is less than 70 vol.%. ! 5. The use of a target according to any one of claims 1 to 3, wherein the target is a target obtained by powder metallurgy. ! 6. The use of the target according to claim 4, wherein the target is a target obtained by powder metallurgy. ! 7. A method for producing a target that is suitable for use according to any one of claims 2 to 6, wherein the target is obtained by a holographic structuring method, wherein the alumina layer is structured in the form of a lattice, and the grooves formed in the lattice are filled with aluminum.
机译:1.靶在施加火花涂层以获得金属氧化物和/或金属氮化物涂层的过程中的用途,由此使用靶,其中靶金属的非导电氧化物和/或氮化物嵌入靶中。该靶金属的基体,因此可以在高于靶中所用金属的熔融温度的温度下操作靶。 ! 2.根据权利要求1所述的靶材的用途,其中,所述靶材包含铝基质,所述铝基质中嵌入有氧化铝的非导电颗粒和/或氮化铝的颗粒。 ! 3.根据权利要求2的靶的用途,其中所述氧化铝颗粒的直径通常小于典型的火花放电直径,因此小于100微米,优选小于50微米。 ! 4.根据权利要求2或3所述的靶材的用途,并且所述铝基质中氧化铝的含量小于70体积%。 ! 5.根据权利要求1-3中任一项的靶的用途,其中所述靶是通过粉末冶金获得的靶。 ! 6.根据权利要求4的靶的用途,其中所述靶是通过粉末冶金获得的靶。 ! 7.根据权利要求2至6中任一项所述的适合于使用的靶的制造方法,其中,所述靶通过全息结构化方法获得,其中,所述氧化铝层以格子状构造,并且所述凹槽形成在格子中的铝填充。

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