Sintering furnace for thermal treatment of planar structure during manufacturing of thin layer solar cell, has protection zone formed in inner side of heating chamber, and suction pipe for suction of gases and ending into protection zone

摘要

The furnace (1) has a heating chamber (3) comprising an inlet aperture (5) and an outlet aperture (7). A conveyor device (9) has a continuous conveyor belt and conveys a planar structure (11) in a conveying direction (F) from the inlet aperture to the outlet aperture. A partially limited protection zone is formed in an inner side of the heating chamber, and a suction pipe (19) for suction of gases ends into the protection zone. The protection zone is limited by a protection wall (17), and a cover plate is formed between the outlet aperture or inlet aperture and an opening of the suction pipe. An independent claim is also included for a method for thermal treatment of a planar structure.