A method for the sublimation growth of aluminum nitride - single crystals

摘要

A process for the production of crystals from aluminum nitride aln by means of sublimation and partial decomposition of aluminum nitride - powder, characterised in thata) an arrangement of one or more heating elements comprise a heat-resistant material, which is selected from the group consisting of molybdenum, mo, tungsten, w, rhenium, osmium os, or their alloys, in highly pure aluminum nitride - powder is embedded,b) the arrangement of heating elements in an atmosphere consisting of highly pure nitrogen n₂ or a mixture of nitrogen n₂ and hydrogen n₂ together with the powder to a temperature of between 1900°C. and 2500°C, is brought to a cavity around the heating element or the heating elements is created around,c) of the resulting structure with an internal cavity is cooled to room temperature,d) of the structure then, by means of mechanical processing is divided into two parts,e) in the upper part of the hollow space is increased by means of mechanical processing,f) in this enlarged cavity a germinal disk is attached, and..