Plasma punch, plasma treatment before the direction, a process for the plasma treatment and method for manufacturing a plasma punch

摘要

Plasma punch with a gas conduction (4), which has at least one porous material has, or consists of, as well as with at least one cavity (2) which, with the gas conduction (4) is connected in a gas permeable and which has an opening to a bottom side (3) of the plasma stamp, wherein gas in the region behind the opening of the cavity (2) in a direction parallel to the surface of the opening by means of the gas conduction (4) is able to be led, characterized by a gas-impermeable layer (5) on that the underside of the plasma side facing away from the die, the gas conduction.