Scanning arm for profile meter, has base body tapering from proximate end to distal end in pyramid shape and comprising support structures partially comprising material with thermal expansion coefficient of specific value

摘要

The arm (2) has a base body (4) whose proximate end (6) is connected with a surface area measuring device and distal end (8) connected with a scanning body (10). The base body tapers from the proximate end to the distal end in pyramid shape. The base body has support structures (12, 12', 12'') partially comprising a material i.e. non-metallic material such as carbon, quartz and/or silica glasses, ceramic or glass ceramic, with thermal expansion coefficient that amounts to = 5x 10 -6 Kelvin.