Particle beam microscope for use with optical path, has magnet lens with optical axis and front pole piece, which is arranged in optical path along optical axis with spacing before object plane

摘要

The particle beam microscope (1) has a magnet lens (3) with an optical axis and a front pole piece (21), which is arranged in an optical path along the optical axis with a spacing before an object plane (19). An object holder is configured to hold an object (5) at an intersection point between the optical axis and the object plane. The X-ray detectors are arranged such that an elevation angle runs between a line and a center of a substrate (35-1).