Weight compensation device of actuator used in lithography device, has axial permanent magnets whose poles are connected to coils for feeding magnetic flux of magnetic circuits formed by magnets, to coils

摘要

The weight compensation device (1) has axial permanent magnets (2,3) that are positioned in parallel to the coils (4,5) and magnetized to form of magnetic circuits. One of the poles (6,7) of the axial permanent magnets is connected to the coils for feeding magnetic flux of the magnetic circuits to the coils. The permanent magnets are sealed within the capsules and an outer permanent magnet ring (15) is arranged between the coils. Independent claims are included for the following: (1) actuator; and (2) manufacturing method of weight compensation device.