Device, useful for drying polysilicon, comprises a process shell for receiving polysilicon, a perforated air separation plate, which is placed on the shell process, a filter and/or an air supply

摘要

Device comprises a process shell (2) for receiving polysilicon; a perforated air separation plate (1), which is placed on the shell process; a filter (4) and/or an air supply (3). An independent claim is included for drying polysilicon comprising passing an air stream with a flow rate of 0.1-3 m/s and a temperature of 20-100[deg] C through the filter and subsequently passing through the perforated air separation plate; and drying the process shell containing polysilicon.