Coated substrate comprises multi-layer anti-reflection coating comprising layers with different refractive indices, where layers with higher refractive index and layers with lower refractive index are alternated

摘要

Coated substrate (3) comprises a multi-layer anti-reflection coating (5) comprising layers with different refractive indices on at least one side (31), where the layers with higher refractive index and layers with lower refractive index are alternated. The layers with a lower refractive index are made of silicon oxide having a portion of aluminum. The ratio of amount of aluminum to silicon is greater than 0.05, preferably greater than 0.08. The amount of silicon predominates with respect to the amount of aluminum. The layers with higher refractive index comprise silicide, oxide or nitride. An independent claim is also included for producing the coated substrate, comprising applying the multi-layer anti-reflection coating on at least one side of the substrate that are constructed by successive depositing of layers with different refractive indices, constructing the layers with lower refractive index and depositing silicide, oxide or nitride-containing layers as layers of higher refractive index.