Method for supplying process gases e.g. helium gas during photovoltaic and semiconductor production, involves temporarily and/or partially supplying helium-rich stream withdrawn from cryogenic helium enrichment

摘要

The method involves providing helium gas and nitrogen gas stream in liquid form. Extracted helium-containing exhaust gas stream is partly subjected to cryogenic helium enrichment. The natural gas and liquid helium are provided in the liquid form for temporarily and/or partially cooling the helium-containing exhaust gas. Helium-rich stream is withdrawn from the cryogenic helium enrichment via a spacer and temporarily and/or partially supplied for flat glass production. Liquid nitrogen and the liquid helium are stored in storage vessels (S1, S2).